Coupling kinetic Monte-Carlo and continuum models with application to epitaxial growth

نویسندگان

  • Tim P. Schulze
  • Peter Smereka
چکیده

We present a hybrid method for simulating epitaxial growth that combines kinetic Monte-Carlo (KMC) simulations with the Burton–Cabrera–Frank model for crystal growth. This involves partitioning the computational domain into KMC regions and regions where we time-step a discretized diffusion equation. Computational speed and accuracy are discussed. We find that the method is significantly faster than KMC while accounting for stochastic fluctuations in a comparable way. 2003 Elsevier Science B.V. All rights reserved.

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تاریخ انتشار 2003